Hybrid plasma system for magnetron deposition of coatings with ion assistance

7th Conference on Low temperature Plasma in the Processes of Functional Coating Preparation

Vavilin, K.V.^1 ; Kralkina, E.A.^1 ; Nekludova, P.A.^1 ; Petrov, A.K.^1 ; Nikonov, A.M.^1 ; Pavlov, V.B.^1 ; Airapetov, A.A.^2 ; Odinokov, V.V.^2 ; Pavlov, G Ya^2 ; Sologub, V.A.^2

Faculty of Physics, Lomonosov MSU, Leninskie Gory 1, Moscow

119991, Russia^1

PJSC Research Institute of Precision Machine Manufacturing, Panfilovsky avenue 10, Zelenograd, Moscow

124469, Russia^2

关键词: External magnetic field;    High frequency HF;    Inductive discharges;    Ion current density;    Magnetron deposition;    Magnetron discharges;    Sputtered materials;    Two-hybrid system;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/669/1/012033/pdf
DOI  :  10.1088/1742-6596/669/1/012033

来源: IOP

【 摘 要 】

The results of the study of the plasma hybrid system based on the combined magnetron discharge and high-frequency inductive discharge located in the external magnetic field is presented. Magnetron discharge provides the generation of atoms and ions of the target materials while the flow of accelerated ions used for the ion assistance is provided by the RF inductive discharge. An external magnetic field is used to optimize the power input to the discharge, to increase the ion current density in the realm of substrate and to enhance the area of uniform plasma. The joint operation of magnetron and RF inductive discharge leads to a substantial increase (not equal to the sum of the parameters obtained under separate operation of two hybrid system channels) of the ion current density and intensity of sputtered material spectral lines radiation. Optimal mode of the hybrid plasma system operation provides uniform ion current density on the diameter of at least 150mm at 0.7PA argon pressure. The optimal values of the magnetic fields in the region of the substrate location lie in the range 2-8 mTl, while in the region of the RF input power unit lie in the range 0.5-25 mTl.