Generation of low-temperature plasma by low-pressure arcs for synthesis of nitride coatings

7th Conference on Low temperature Plasma in the Processes of Functional Coating Preparation

Krysina, O.V.^1,2 ; Koval, N.N.^1,2 ; Lopatin, I.V.^1 ; Shugurov, V.V.^1 ; Kovalsky, S.S.^1,2

Institute of High Current Electronics SB RAS, Tomsk

634055, Russia^1

National Research Tomsk State University, Tomsk

634050, Russia^2

关键词: Element concentrations;    Hollow cathodes;    Hot filament;    Low pressure arc;    Low temperature plasmas;    Mixed-metals;    Nitride coating;    Vacuum arc deposition;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/669/1/012032/pdf
DOI  :  10.1088/1742-6596/669/1/012032

来源: IOP

【 摘 要 】

Experiments were performed to study gas, metal, and mixed metal-gas plasmas. The plasmas were generated with the use of an arc evaporator and a gas-plasma source with a hot filament and hollow cathode that were operated independently or simultaneously. It has been revealed that the arc current of gas-plasma source affects the parameters of the metal-gas plasma and the element concentrations in the coatings. It has been demonstrated that the characteristics of the nitride coatings produced by plasma-assisted vacuum-arc deposition can be controlled by varying the parameters of the arc in the gas-plasma source.