Low temperature plasma RF capacitive discharge in helium at atmospheric pressure

7th Conference on Low temperature Plasma in the Processes of Functional Coating Preparation

Hakki, A.^1 ; Fayrushin, I.^1 ; Kashapov, N.^1

Kazan Federal University, Kremlyovskaya St, bdg.18, Kazan

420008, Russia^1

关键词: Low temperature plasmas;    Maximum power;    Power supply;    Rf capacitive discharges;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/669/1/012022/pdf
DOI  :  10.1088/1742-6596/669/1/012022

来源: IOP

【 摘 要 】

The paper describes Low temperature plasma RF capacitive discharge in helium at atmospheric pressure. The circuit has been done, to obtain output currentabout 90mA,and the maximum power was 100W, The frequency of the discharging was f = 40MHz.Twolamps (-50) were used in power supply. Helium consumption was about 1.5l/m.