Enhancing of the glow discharge stability in chamber with cathode sections coated by a discontinuous dielectric coating

7th Conference on Low temperature Plasma in the Processes of Functional Coating Preparation

Galeev, I.G.^1 ; Asadullin, T Ya^1

Kazan National Research Technical University Named by A.N.Tupolev, K.Marx str. 10, Kazan

420111, Russia^1

关键词: Current discharge;    Dielectric coatings;    Discharge stability;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/669/1/012015/pdf
DOI  :  10.1088/1742-6596/669/1/012015

来源: IOP

【 摘 要 】

A method of increasing stability of the glow discharge in a gas flow is implemented by reducing the effective current density at the cathode. In this method the current redistributes at the partitioned cathode using the change in the area of the working surface of each section by applying a discontinuous dielectric coating so that it reaches the distribution of the maximum sustainable current discharge across the working surface of each cathode section.