Microwatt-Powered, Low-Cost, Printed Graphene Oxide Humidity Sensors for Distributed Network Applications

15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Taylor, Anthony P.^1 ; Velásquez-García, Luis F.^2

Edwards Vacuum LLC, Sanborn

NY

14132, United States^1

Microsystems Technology Laboratories, Massachusetts Institute of Technology, 77 Massachusetts Ave., Cambridge

MA

01239, United States^2

关键词: Distributed networks;    Distributed sensor networks;    Electrode structure;    Electrospray emitter;    Low-power consumption;    Metallization techniques;    Quadratic dependence;    Relative humidity range;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/660/1/012134/pdf
DOI  :  10.1088/1742-6596/660/1/012134

来源: IOP

【 摘 要 】

We report the design, fabrication, and characterization of novel conductometric humidity sensors that employ an ultrathin film of graphene oxide (GO) nanoflakes as transducing element. The GO film is deposited with a shadow mask using an electrospray emitter operated at atmospheric pressure; no post treatments-including annealing or doping- were applied to the GO sensors. The Van der Pauw electrode structure used in the sensor had 50 μm linewidths separated by 600 μm and was fabricated with the lift-off metallization technique. In dynamic humidity tests conducted at atmospheric pressure, the sensor tracks the response of a commercial sensor and reacts to changes in humidity in less than 500 ms. There is a quadratic dependence of the relative humidity on the sensor resistance for the relative humidity range between 3% and 63%, with more than a three-fold change in resistance over the range. The power consumption of the sensor is less than 30 μW while drawing 7 μA, and less than 15 μW while drawing 5 μA. Our devices are promising candidates for deployment in a distributed sensor network due to their low cost, small size, and low power consumption.