Development of Near-Field-Enhanced High-Fill-Factor MEMS Radiator with Shared Spring

15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Nakajima, H.^1 ; Oh, S.^1 ; Ueno, A.^1 ; Morimoto, K.^1 ; Suzuki, Y.^1

Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan^1

关键词: Fill factor;    High fill factors;    Near field effect;    Near fields;    Parylenes;    Radiation heat flux;    Thermal boundary conditions;    Thermal control;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/660/1/012049/pdf
DOI  :  10.1088/1742-6596/660/1/012049

来源: IOP

【 摘 要 】

For precise thermal control in satellites under varying internal heat dissipation and thermal boundary condition, we propose a high-fill factor MEMS radiator enhanced by the near-field effect. We have successfully fabricated a prototype with parylene shared springs and achieved a fill factor of as high as 89%. It is found that at the ON state, the diaphragm temperature is increased from 58.0 °C to 106.4 °C, showing 144% enhancement in the radiation heat flux.