会议论文详细信息
15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications | |
Development of Near-Field-Enhanced High-Fill-Factor MEMS Radiator with Shared Spring | |
物理学;能源学 | |
Nakajima, H.^1 ; Oh, S.^1 ; Ueno, A.^1 ; Morimoto, K.^1 ; Suzuki, Y.^1 | |
Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan^1 | |
关键词: Fill factor; High fill factors; Near field effect; Near fields; Parylenes; Radiation heat flux; Thermal boundary conditions; Thermal control; | |
Others : https://iopscience.iop.org/article/10.1088/1742-6596/660/1/012049/pdf DOI : 10.1088/1742-6596/660/1/012049 |
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来源: IOP | |
【 摘 要 】
For precise thermal control in satellites under varying internal heat dissipation and thermal boundary condition, we propose a high-fill factor MEMS radiator enhanced by the near-field effect. We have successfully fabricated a prototype with parylene shared springs and achieved a fill factor of as high as 89%. It is found that at the ON state, the diaphragm temperature is increased from 58.0 °C to 106.4 °C, showing 144% enhancement in the radiation heat flux.
【 预 览 】
Files | Size | Format | View |
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Development of Near-Field-Enhanced High-Fill-Factor MEMS Radiator with Shared Spring | 920KB | download |