Piezoelectric cellular micro-structured PDMS material for micro-sensors and energy harvesting

15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Kachroudi, A.^1,2,3 ; Basrour, S.^1,2 ; Rufer, L.^1,2 ; Jomni, F.^3

Univ. Grenoble Alpes, TIMA Laboratory, Grenoble

F-38031, France^1

CNRS, TIMA Laboratory, Grenoble

F-38031, France^2

Université de Tunis El Manar, Faculté des Sciences de Tunis, Laboratoire Matériaux, Organisation et Propriétés (LMOP), Tunis

2092, Tunisia^3

关键词: Dielectric spectra;    Low cost fabrication;    Mechanical characterizations;    Polydimethylsiloxane PDMS;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/660/1/012040/pdf
DOI  :  10.1088/1742-6596/660/1/012040

来源: IOP

【 摘 要 】

This paper reports a novel low-cost fabrication process of a charged cellular microstructured polydimethylsiloxane (PDMS) material referred as piezo-electret or ferro-electret for micro-sensors applications. The dielectric spectra reached on these structures exhibit a high piezoelectric longitudinal coefficient d33of 350pC/N. A mechanical characterization method proves the reliability of this material for low-frequencies applications around 100Hz.