Cantilevers-on-membrane design for broadband MEMS piezoelectric vibration energy harvesting

15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Jia, Yu^1,2 ; Du, Sijun^2 ; Seshia, Ashwin A.^2

Faculty of Science and Engineering, Thornton Science Park, University of Chester, Chester

CH2 4NU, United Kingdom^1

Department of Engineering, University of Cambridge, Trumpington Street, Cambridge

CB2 1PZ, United Kingdom^2

关键词: Broadband excitation;    Doubly clamped beam;    Operational frequency;    Piezoelectric membranes;    Piezoelectric vibration;    Power enhancement;    Strain distributions;    White noise excitation;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/660/1/012030/pdf
DOI  :  10.1088/1742-6596/660/1/012030

来源: IOP

【 摘 要 】

Most MEMS piezoelectric vibration energy harvesters involve either cantilever-based topologies, doubly-clamped beams or membrane structures. While these traditional designs offer simplicity, their frequency response for broadband excitation are typically inadequate. This paper presents a new integrated cantilever-on-membrane design that attempts to both optimise the strain distribution on a piezoelectric membrane resonator and improve the power responsiveness of the harvester for broadband excitation. While a classic membrane-based resonator has the potential to theoretically offer wider operational frequency bandwidth than its cantilever counterpart, the addition of a centred proof mass neutralises its otherwise high strain energy regions. The proposed topology addresses this issue by relocating the proof mass onto subsidiary cantilevers and integrates the merits of both the membrane and the cantilever designs. When experimentally subjected to a band-limited white noise excitation, up to approximately two folds of power enhancement was observed for the new membrane harvester compared to a classic plain membrane device.