Piezoelectric MEMS for energy harvesting

15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Kanno, Isaku^1

Kobe University, 1-1 Rokkodai-cho, Nada-ku, Kobe

659-8501, Japan^1

关键词: Future applications;    Gyro sensors;    Lead-Free;    Microdevices;    Piezoelectric energy harvesters;    Piezoelectric energy harvesting;    Piezoelectric MEMS;    Piezoelectric pzt thin films;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/660/1/012001/pdf
DOI  :  10.1088/1742-6596/660/1/012001

来源: IOP

【 摘 要 】

Recently, piezoelectric MEMS have been intensively investigated to create new functional microdevices, and some of them have already been commercialized such as MEMS gyrosensors or miropumps of inkjet printer head. Piezoelectric energy harvesting is considered to be one of the promising future applications of piezoelectric MEMS. In this report, we introduce the deposition of the piezoelectric PZT thin films as well as lead-free KNN thin films. We fabricated piezoelectric energy harvesters of PZT and KNN thin films deposited on stainless steel cantilevers and compared their power generation performance.