The Effect of Doping on the Electrophysical Properties of Polycrystalline Diamond Films Deposited from an Abnormal Glow Discharge

12th International Conference on Gas Discharge Plasmas and Their Applications

Kabyshev, A.V.^1 ; Konusov, F.V.^1 ; Linnik, S.A.^1 ; Remnev, G.E.^1

National Research Tomsk Polytechnic University, Lenin Avenue, 30, Tomsk

634050, Russia^1

关键词: Abnormal glow discharge;    Charge carrier transfer;    Electrical characteristic;    Electrical conduction;    Electrophysical properties;    Localized state;    Polycrystalline diamond films;    Semiconductor layers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/652/1/012030/pdf
DOI  :  10.1088/1742-6596/652/1/012030

来源: IOP

【 摘 要 】

The paper is focused on the study of the boron doping effect on the electrical characteristics, on the mechanism of charge carrier transfer, and on the energy spectrum of the localized defect states in the polycrystalline diamond films (PDF) deposited from an abnormal glow discharge. PDF doping enables to form the semiconductor layers of p-type conductivity, which have as good properties as those of PDF produced by the alternative methods. The doping reduces the degree of disorder in the film material brought by the growth defects, which determine the film electrical characteristics and electrotransfer mechanism. The PDF electrical characteristics and electrotransfer mechanism are determined by the defects of different nature, whose band gap energy levels have a continuous energy distribution. A p-type activation component is realized in the exchange of charge carriers between the valence band and shallow acceptor levels with the activation energy of 0.013-0.022 eV. Doping increases the effect of the hopping mechanism of the conductivity involving the localized states with a density of (1-6)•1020eV-1•cm-3distributed near the Fermi level, which is in the low half of the band gap.