Self-consistent absorption correction for quantitative energy- dispersive X-ray spectroscopy of InGaN layers in analytical transmission electron microscopy

Electron Microscopy and Analysis Group Conference 2015

Walther, T.^1 ; Wang, X.^1

Department of Electronic and Electrical Engineering, University of Sheffield, Mappin Building, Mappin Street, Sheffield

S1 3JD, United Kingdom^1

关键词: Absorption corrections;    Analytical transmission electron microscopy;    Energy dispersive X ray spectroscopy;    Experimental spectra;    Intensity ratio;    Mass thickness;    Self-consistency;    Specimen thickness;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/644/1/012006/pdf
DOI  :  10.1088/1742-6596/644/1/012006

来源: IOP

【 摘 要 】

A new method of absorption correction for energy-dispersive X-ray spectroscopy in a transmission electron microscope is tested on InGaN samples. We simulate the effective k-factor for the In L line with respect to Ga L or Ga K and plot this as a function of the Ga K/L intensity ratio, which can be directly measured from experimental spectra. This basically performs an internal self-consistency check in the quantification using differently absorbed X-ray lines, which is in principle equivalent to an absorption correction as a function of specimen thickness but has the practical advantage that neither specimen thickness nor density or mass-thickness of the specimens need actually be measured.