Formation of elements of integrated acousto-optic cell based on LiNbO3 films by methods of nanotechnology

2nd International School and Conference Saint-Petersburg OPEN on Optoelectronics, Photonics, Engineering and Nanostructures

Ageev, O.A.^1 ; Zamburg, E.G.^2 ; Kolomiytsev, A.S.^2 ; Suchkov, D.O.^3 ; Shipulin, I.A.^2 ; Shumov, A.V.^2

Institute of Nanotechnology, Electronics and Electronic Equipment Engineering, Southern Federal University, 2 Shevchenko St., Taganrog

347900, Russia^1

Department of Nanotechnology and MEMS, Southern Federal University, Institute of Nanotechnology, 2 Shevchenko St., Taganrog

347900, Russia^2

Department of Radio-Technical Electronics, Southern Federal University, Institute of Nanotechnology, 2 Shevchenko St., Taganrog

347900, Russia^3

关键词: Acousto-optic cell;    Cluster complexes;    Input-output;    Laser emission;    Micro-lens;    Single process;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/643/1/012031/pdf
DOI  :  10.1088/1742-6596/643/1/012031

来源: IOP

【 摘 要 】

In the experiments we defined modes, and developed the technology of formation of elements of input-output laser emission and microlens of integrated acousto-optic cell by Pulsed Laser Deposition and Focused Ion Beams by using nanotechnology cluster complex, allowing controlled creation of elements in a single process cycle.