Measurement of Length and Position with Frequency Combs

23rd Congress of the International Commission for Optics

Weimann, C.^1,2 ; Hoeller, F.^3 ; Schleitzer, Y.^3 ; Diez, C.A.^3 ; Spruck, B.^3 ; Freude, W.^2 ; Boeck, Y.^4 ; Koos, C.^1,2

Institute of Photonics and Quantum Electronics, Karlsruhe Institute of Technology (KIT), Karlsruhe, Germany^1

Institute of Microstructure Technology, KIT, Karlsruhe, Germany^2

Corporate Research and Technology, Carl Zeiss AG, Oberkochen, Germany^3

Microwave Engineering Lab., Berlin Institute of Technology, Berlin, Germany^4

关键词: Absolute distance measurement;    Acquisition time;    Frequency combs;    Measurement of length;    Mode-locked laser;    Photonic integrations;    Retro reflector;    Topography measurement;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/605/1/012030/pdf
DOI  :  10.1088/1742-6596/605/1/012030

来源: IOP

【 摘 要 】

We show two different absolute distance measurement methods with micrometer accuracy based on frequency combs, and we discuss possible applications. Using a mode- locked laser and MEMS-based tracking optics, we measure the 3D position of a retroreflector within 10 ms and with a 24 μm volumetric accuracy. We also investigate modulator-based combs and show that they enable highly sensitive surface topography measurements with microsecond acquisition times and micrometer precision. Moreover, the potential for photonic integration of frequency comb sources is explored.