Fabrication of a microlens array in BK7 through laser ablation and thermal treatment techniques

23rd Congress of the International Commission for Optics

Blanco, M.^1 ; Nieto, D.^1 ; Flores-Arias, M.T.^1

Microoptics and GRIN Optics Group, Applied Physics Department, University of Santiago de Compostela, Santiago de Compostela

E15782, Spain^1

关键词: Borosilicate glass substrates;    Focal lengths;    Laser direct write;    Laser direct-write technique;    Laser-based methods;    Micro-lens arrays;    Post thermal treatment;    Treatment techniques;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/605/1/012023/pdf
DOI  :  10.1088/1742-6596/605/1/012023

来源: IOP

【 摘 要 】

We propose a laser-based method for fabricating microlens on borosilicate glass substrates. The technique is composed by a laser direct-write technique using a Nd : YVO4for fabricating the microlens arrays and a post thermal treatment with a CO2laser for improving its morphological and optical properties. The proposed technique will allow us to obtain microlenses with a broad range of diameters (50μm-500μm) and focal lengths (1mm-5mm). By combining laser direct-write and the thermal treatment assisted by a CO2laser, we are able to obtain good quality elements.