Measurement uncertainty consideration in the case of nonlinear models for precision length measurement

2014 Joint IMEKO TC1-TC7-TC13 Symposium: Measurement Science Behind Safety and Security

Manske, E.^1 ; Fröhlich, T.^1 ; Füßl, R.^1

Technische Universitat Ilmenau, Faculty of Mechanical Engineering, PO Box 100 565, Ilmenau

98684, Germany^1

关键词: Dimensional Metrology;    Length measurement;    Load measurements;    Measurement uncertainty;    National metrology institutes;    Non-linear model;    Precision optics;    Technical development;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/588/1/012033/pdf
DOI  :  10.1088/1742-6596/588/1/012033

来源: IOP

【 摘 要 】

The requirements on the precision lengths and precision load measurement rise due to the rapid technical development, in particular of nanotechnologies and precision optics. According to the roadmap "Dimensional metrology for micro- and nanotechnology" of the European National Metrology Institutes (iMERA)2in the next few years "traceable 2D (3D) metrology at (sub)-nm accuracy over several 100 mm range" will be required.