Influence of the planar cylindrical target erosion zone of magnetron sputtering on the uniformity of a thin-film coating

International Scientific Seminars on "Fundamental and Applied Problems of Photonics and Condensed Matter Physics"

Vasilev, D.D.^1 ; Moiseev, K.M.^1

Bauman Moscow State Technical University, 2nd Baumanskaya str. 5, Moscow

105005, Russia^1

关键词: Coating uniformity;    Cylindrical target;    Erosion zones;    Real-world system;    Thin-film coatings;    Working time;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/584/1/012012/pdf
DOI  :  10.1088/1742-6596/584/1/012012

来源: IOP

【 摘 要 】

The constant change in the erosion zone of magnetron sputtering targets makes simulating their profile difficult, whilst the measurement of real-world systems requires a long working time. However, by using the measured erosion zone profile of a real target, a formula for calculating the uniformity of thin films has been developed. Using this, it has been found that the erosion zone of a 4 cylindrical magnetron target can improve coating uniformity.