The interference Linnik type microscope (IM) developed at Inmetro

7th Brazilian Congress on Metrology

Malinovski, I.^1 ; Couceiro, I.B.^1 ; Lima, M.S.^1 ; França, R.S.^1 ; Von Der Weid, J.P.^2

Optical Metrology Division, National Institute of Metrology Quality and Technology, INMETRO, Av. N. S. das Graças 50, Xerém, Duque de Caxias, RJ

25250-020, Brazil^1

Telecommunication Center (CETUC), Catolic University-PUC-Rio, Rua Marquês de São Vicente 22, Rio de Janeiro Gávea, RJ

22453-900, Brazil^2

关键词: Frequency stabilized lasers;    High resolution;    Interference microscopes;    Length measurement;    Nanometrology;    Primary standards;    Vertical axis;    Wave-length standard;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/575/1/012024/pdf
DOI  :  10.1088/1742-6596/575/1/012024

来源: IOP

【 摘 要 】

The interference Linnik type microscope was developed and it design was modernized to provide high resolution nanometrology facility. This microscope can perform length measurement directly relative to wavelength standards such as the frequency stabilized lasers. Thus, one can use interference microscope for primary calibration of the step heights. These step heights can be used to calibrate vertical axis of the other instruments like optical coherence tomography, atomic force microscope, confocal microscope, etc. In all cases the traceability to the National Institute of Metrology, Quality and Technology length primary standards was attempted to be established.