Transparent Conductive Oxides in Thin Film Photovoltaics

INERA Workshop: Transition Metal Oxide Thin Films-functional Layers in "Smart windows" and Water Splitting Devices

Hamelmann, Frank U.^1

University of Applied Sciences Bielefeld, Technical Faculty, Artilleriestraße 9a, Minden

32427, Germany^1

关键词: Aluminum-doped ZnO;    Long term stability;    Optical and electrical characterization;    Post deposition treatment;    Surface textures;    Thin film photovoltaics;    Thin film silicon;    Transparent conductive oxides;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/559/1/012016/pdf
DOI  :  10.1088/1742-6596/559/1/012016

来源: IOP

【 摘 要 】

This paper show results from the development of transparent conductive oxides (TCO's) on large areas for the use as front electrode in thin film silicon solar modules. It is focused on two types of zinc oxide, which are cheap to produce and scalable to a substrate size up to 6 m2. Low pressure CVD with temperatures below 200°C can be used for the deposition of boron doped ZnO with a native surface texture for good light scattering, while sputtered aluminum doped ZnO needs a post deposition treatment in an acid bath for a rough surface. The paper presents optical and electrical characterization of large area samples, and also results about long term stability of the ZnO samples with respect to the so called TCO corrosion.