Oxide coatings on flexible substrates for electrochromic applications

INERA Workshop: Transition Metal Oxide Thin Films-functional Layers in "Smart windows" and Water Splitting Devices

Aleksandrova, M.^1

Technical University of Sofia, Department of Microelectronics, Kliment Ohridski blvd, 8, bl. 1, Sofia

1000, Bulgaria^1

关键词: Deposition methods;    Electro-chromic applications;    Electrochromic coating;    Electrochromic displays;    Electrooptical parameters;    Flexible substrate;    Modern microelectronics;    Windows application;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/559/1/012003/pdf
DOI  :  10.1088/1742-6596/559/1/012003

来源: IOP

【 摘 要 】

One of the most studied classes of materials in the modern microelectronic devices are the metal oxides. There are different metal oxide films, such as electrodes, charge injecting and electrochromic coatings for displays or «smart» windows applications. This paper aims to describe the recent achievements for oxide coating deposition for flexible electrochromic displays. Although many deposition methods for production of such films have been developed, some of the achievements in the field of RF sputtering of transparent electrodes from indium-tin oxide on low-cost polyethyleneterephthalate substrate are presented. Attention is paid on some critical issues, such as films electro-optical parameters (sheet resistance, transparency in the visible range), adhesion, degradation due to stress and patterning ability.