Stability and spring constant investigation for micromachined inductive suspensions: theoretical analysis vs. experimental results

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Poletkin, K.^1 ; Lu, Z.^1 ; Den Hartogh, B.^2 ; Wallrabe, U.^1 ; Badilita, V.^1

Laboratory for Microactuators, Department of Microsystems Engineering-IMTEK, University of Freiburg, Georges-Köhler-Allee 102, Freiburg

79110, Germany^1

FemtoTools AG, Furtbachstrasse 4, Buchs/ZH

CH 8107, Switzerland^2

关键词: Angular displacement;    Equilibrium point;    Experimental analysis;    Levitation force;    Mechanical parameters;    Spring constants;    Stable levitation;    Stiffness values;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012133/pdf
DOI  :  10.1088/1742-6596/557/1/012133

来源: IOP

【 摘 要 】

We present a linear analytical model coupled with experimental analysis to discuss stability of a levitated proof mass (PM) in a micromachined inductive suspension (MIS), which has been previously introduced and characterized. The model is a function of the MIS geometry, describes the dynamics of a levitated disk-shaped PM near the equilibrium point, and predicts conditions for stable levitation. The experimental setup directly measures the lateral component of the Lorentz force, which has a stabilization role in the MIS structure, as well as the vertical levitation force. The experimental setup is further used to derive mechanical parameters such as stiffness values relative to lateral, vertical and angular displacements, proven to be in excellent agreement with the values predicted by the analytical model.