Influence of Various Conducting and Inorganic Dielectric Drift Barriers on the Charge Decay in Parylene-C Electret Layers

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Genter, S.^1 ; Paul, O.^1

Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany^1

关键词: Charge decay;    Charge-carrier distribution;    Charging efficiency;    Inorganic dielectrics;    Inorganic materials;    Long term stability;    Potential reduction;    Structured metals;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012102/pdf
DOI  :  10.1088/1742-6596/557/1/012102

来源: IOP

【 摘 要 】

This paper reports on an attempt to improve the charge carrier life time in electret layers made of Parylene-C by implementing a patterned drift barrier close to the surface. Using various, differently structured metals and inorganic materials as a drift barrier, the initial surface potential directly after charging was increased by about 11.5% compared to electret layers made of pure Parylene-C. Furthermore, a higher charging efficiency was achieved. The charge carrier distribution has a higher homogeneity and the usually observed surface potential reduction at the rim of the electret layer was less pronounced. Against expectations, the long-term stability did not improve among the chosen materials and patterns. Regarding side effects observed with unstructured drift barriers, the electret layers with a structured drift barrier do not suffer from the horizontal discharging.