Characterization of piezoelectric material for micro thermal harvesters

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Trioux, E.^1,2,3 ; Monfray, S.^1 ; Skotnicki, T.^1 ; Basrour, S.^2,3 ; Muralt, P.^4

STMicroelectronics, Crolles, France^1

University Grenoble Alpes, TIMA Laboratory, Grenoble

F-38031, France^2

CNRS, TIMA Laboratory, Grenoble

F-38031, France^3

Ceramics Laboratory, EPFL, Lausanne, Switzerland^4

关键词: Bistable structures;    Fabricated structures;    Initial deflection;    Piezoelectric conversion;    Piezoelectric layers;    Piezoelectric thin films;    Sensor and actuators;    Thermo-mechanical;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012087/pdf
DOI  :  10.1088/1742-6596/557/1/012087

来源: IOP

【 摘 要 】

This paper presents the first realizations of a novel concept for thermal energy harvesting at micro scale. The devices proposed here are based on a two-step transduction combining thermo-mechanical and piezoelectric conversion. In this contribution, we present for the first time results on micro fabricated structures with integrated piezoelectric layers, focusing mainly on the characterization of the piezoelectric material. The process flow to get a bilayered bistable structure is briefly described, highlighting the way how to control the initial deflection. The characterization of the piezoelectric thin film is presented then. The e31,fcoefficient is measured in both sensor and actuator mode and is found to be equal to -0,91 C.m-2in both configurations. This value, close to the state-of-the-art, is very promising for the future thermal harvesting applications. Finally the buckling of a structure actuated by a voltage was observed and the corresponding displacement measured by laser interferometry.