A micro-structured Si-based electrodes for high capacity electrical double layer capacitors

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Krikscikas, Valdas^1 ; Oguchi, Hiroyuki^1 ; Yanazawa, Hiroshi^2 ; Hara, Motoaki^1 ; Kuwano, Hiroki^1

Tohoku University, Japan^1

MEMS-CORE, Japan^2

关键词: Au electrodes;    Electric double-layer capacitor (EDLC);    Electrical double layer capacitor;    Electrode surfaces;    Fundamental properties;    High capacity;    High surface area;    Microstructured electrodes;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012045/pdf
DOI  :  10.1088/1742-6596/557/1/012045

来源: IOP

【 摘 要 】

We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm2, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.