Airflow energy harvesters of metal-based PZT thin films by self-excited vibration

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Suwa, E.^1 ; Tsujiura, Y.^1 ; Kurokawa, F.^1 ; Hida, H.^1 ; Kanno, I.^1

Department of Mechanical Engineering, Kobe University, 1-1 Rokkodai-cho, Nada-ku, Kobe, Japan^1

关键词: Angle of attacks (AOA);    Energy Harvester;    Initial bending;    Large vibrations;    PZT thin film;    rf-Magnetron sputtering;    Self-excited vibrations;    Vibration modes;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012029/pdf
DOI  :  10.1088/1742-6596/557/1/012029

来源: IOP

【 摘 要 】

We developed self-excited vibration energy harvesters of Pb(Zr,Ti)O3(PZT) thin films using airflow. To enhance the self-excited vibration, we used 30-μm-thick stainless steel (SS304) foils as base cantilevers on which PZT thin films were deposited by rf-magnetron sputtering. To compensate for the initial bending of PZT/SS304 unimorph cantilever due to the thermal stress, we deposited counter PZT thin films on the back of the SS304 cantilever. We evaluated power-generation performance and vibration mode of the energy harvester in the airflow. When the angle of attack (AOA) was 20° to 30°, large vibration was generated at wind speeds over 8 m/s. By FFT analysis, we confirmed that stable self-excited vibration was generated. At the AOA of 30°, the output power reached 19 μW at wind speeds of 12 m/s.