Direct Detectors for Electron Microscopy

Electron Microscopy and Analysis Group Conference 2013

Clough, R.N.^1 ; Moldovan, G.^2 ; Kirkland, A.I.^1

Department of Materials, University of Oxford, Parks Road, OX1 3PH, United Kingdom^1

Oxford Instruments NanoAnalysis, Halifax Road, HP12 3SE High Wycombe, United Kingdom^2

关键词: Detective quantum efficiency;    Detector performance;    Electrical signal;    High spatial frequency;    Higher resolution;    Performance enhancements;    Photon conversion;    Primary electrons;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/522/1/012046/pdf
DOI  :  10.1088/1742-6596/522/1/012046

来源: IOP

【 摘 要 】

There is interest in improving the detectors used to capture images in transmission electron microscopy. Detectors with an improved modulation transfer function at high spatial frequencies allow for higher resolution in images at lower magnification, which leads to an increased effective field of view. Detectors with improved detective quantum efficiency are important for low dose applications. One way in which these performance enhancements can be achieved is through direct detection, where primary electrons are converted directly into suitable electrical signals by the detector rather than relying on an indirect electron to photon conversion before detection. In this paper we present the characterisation of detector performance for a number of different direct detection technologies, and compare these technologies to traditional indirect detectors. Overall our results show that direct detection enables a significant improvement in all aspects of detector performance.