Understanding the limitations of the Super-X energy dispersive x-ray spectrometer as a function of specimen tilt angle for tomographic data acquisition in the S/TEM

Electron Microscopy and Analysis Group Conference 2013

Slater, T.J.A.^1 ; Camargo, P.H.C.^2 ; Burke, M.G.^1 ; Zaluzec, N.J.^3 ; Haigh, S.J.^1

School of Materials, University of Manchester, M13 9PL Manchester, United Kingdom^1

Departamento de Química Fundamental, Instituto de Química, Universidade de São Paulo, São Paulo, Brazil^2

Argonne National Laboratory, Argonne, IL 60439, United States^3

关键词: Analytical systems;    Detector systems;    Energy dispersive x-ray spectrometers;    Scanning transmission electron microscopes;    Tomographic;    Tomographic data;    X-ray energy dispersive spectroscopy;    X-ray signals;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/522/1/012025/pdf
DOI  :  10.1088/1742-6596/522/1/012025

来源: IOP

【 摘 要 】

We have investigated the use of x-ray energy dispersive spectroscopy during tomographic hyperspectral imaging experiments in the scanning transmission electron microscope. In this work, we have found that for an analytical system employing a commercial high-tilt tomography holder the measured x-ray signal is limited by shadowing caused by the penumbra of the holder relative to the x-ray detector system. This limits the ability to perform quantitative, elemental tomographic analysis.