Towards sub-10 meV energy resolution STEM-EELS

Electron Microscopy and Analysis Group Conference 2013

Krivanek, Ondrej L.^1 ; Lovejoy, Tracy C.^1 ; Murfitt, Matthew F.^1 ; Skone, Gwyn^1 ; Batson, Philip E.^2 ; Dellby, Niklas^1

Nion Co., 1102 8th St., Kirkland, WA 98033, United States^1

IAMDN, Rutgers University, Piscataway, NJ 08854, United States^2

关键词: Energy resolutions;    MeV energy;    Resolution limits;    Scanning transmission electron microscopes;    STEM-EELS;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/522/1/012023/pdf
DOI  :  10.1088/1742-6596/522/1/012023

来源: IOP

【 摘 要 】

A monochromator we have introduced is improving the attainable energy resolution of electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM) by more than 2x relative to what has been available until recently. Here we briefly review the design and the performance attained so far. We then investigate the ultimate resolution limits of our system and show that it should be able to reach an energy resolution of