会议论文详细信息
4th International Workshop & Summer School on Plasma Physics 2010
Microwave N2-Ar Plasma Torch
Henriques, J.^1 ; Tatarova, E.^1 ; Dias, F.M.^1 ; Ferreira, C.M.^1
Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, 1049-001 Lisboa, Portugal^1
关键词: Dispersion equations;    Electronic excited state;    Electronic ground state molecules;    Gas thermal balance equation;    Microwave plasma torch;    Symmetric surface wave;    Vibrationally excited;    Vibrationally excited state;   
Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/516/1/012004/pdf
DOI  :  10.1088/1742-6596/516/1/012004
来源: IOP
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【 摘 要 】

This work investigates the spatial structure of a microwave plasma torch driven by an azimuthally symmetric surface wave operating in N2-Ar mixtures at atmospheric pressure. The main plasma and wave characteristics are obtained in the framework of a self-consistent 2D model that describes the entire spatial structure of this source, including the discharge zone, sustained by the field of the surface TM00 mode, and the post-discharge plasma. The set of equations considered to describe the plasma source include: Maxwell's equations; the dispersion equation of the surface mode; the rate balance equations for vibrationally excited states of electronic ground state molecules N2(X1Σ+g,ν); the rate balance equations for the triplet N2(A3Σ+u,B3Πg,C3Πu) and singlet N2(a'1Σ-u,a1Πg,w1Δ u, a"1Σ+u) electronic excited states of nitroge and the Ar(3p54s) and Ar(3p54p) excited states of Argon; the rate balance equations for N+,N+2,N+3,N+4,Ar+,Ar+2 ions and electrons; the rate balance equations for the ground state N(4S) and the metastable states N(2P,2D) of nitrogen atoms; the gas thermal balance equation; and the equation of mass conservation for the fluid. Model calculations of the 2D spatial distributions of species of interest such as charged particles (electrons and positive ions), N2(X1Σ+g, ν) vibrationally excited molecules, N2(A3Σ+u) metastables and N(4S) ground state atoms are presented and discussed.

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