Mobility of positive ions in CF4

18th International Summer School on Vacuum, Electron and Ion Technologies

Stojanovic´, V.^1 ; Raspopovic´, Z.^1 ; Jovanovic´, J.V.^2 ; Urquijo, J De^3 ; Petrovic´, Z Lj^1

Institute of Physics, University of Belgrade, POB 68, 11080 Belgrade, Serbia^1

Faculty of Mechanical Engineering, University of Belgrade, 16 Kraljice Marije, 11000 Belgrade, Serbia^2

Centro de Ciencias Fisicas, Universidad Nacional Autonoma de México, PO Box 48-3, 62251 Cuernavaca Mor., Mexico^3

关键词: DC field;    Gas density;    Gas temperature;    Transport parameters;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/514/1/012059/pdf
DOI  :  10.1088/1742-6596/514/1/012059

来源: IOP

【 摘 要 】

Cross-section sets for transport of positive ions in CF4that fit the available experimental data for mobility are assessed by normalizing the available experimental and theoretical cross-sections within the framework of the swarm method. Transport parameters for positive ions in CF4in DC fields at a gas temperature of T = 300 K are calculated as a function of the reduced electric fields E/N (N being the gas density) by using Monte Carlo simulation.