Development of topologically structured membranes of aluminum oxide

18th International Summer School on Vacuum, Electron and Ion Technologies

Bankova, A.^1 ; Videkov, V.^1 ; Tzaneva, B.^1

Technical University of Sofia, 8 Kliment Ohridski Blvd., 1000 Sofia, Bulgaria^1

关键词: Anodic aluminum oxide;    Mechanical bending;    Microelectromechanical system (MEMS);    Nano-structured;    Selective process;    Sensor structures;    Technological scheme;    Ultra sensitives;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/514/1/012027/pdf
DOI  :  10.1088/1742-6596/514/1/012027

来源: IOP

【 摘 要 】

In recent years, nanomembranes have become one of the most widely used construction material for ultrasensitive and ultrathin applications in micro-electromechanical systems (MEMS) and other sensor structures due to their remarkable mechanical properties. Among these, the mechanical stability is of particular importance. We present an approach to the analysis of the stability of nanostructured anodic aluminum oxide free membranes subjected to mechanical bending. The membranes tested were with a thickness of 500 nm to 15 urn in various topological shapes; we describe the technological schemes of their preparation. Bends were applied to membranes prepared by using a selective process of etching and anodizing. The results of the preparation of the membranes are discussed, together with the influence of the angle of deflection, and the number of bendings. The results obtained can be used in designing MEMS structures and sensors which use nanostructured anodic aluminum oxide.