Room-temperature sensitivity to NO2 exposure of electrochemically-deposited nanostructured ZnO layers

18th International Summer School on Vacuum, Electron and Ion Technologies

Lovchinov, K.^1 ; Petrov, M.^1 ; Ganchev, M.^1 ; Georgieva, V.^2 ; Nichev, H.^1 ; Georgieva, B.^1 ; Dimova-Malinovska, D.^1

Central Laboratory of Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, 72 Tsarigradsko Chaussee, 1784 Sofia, Bulgaria^1

Acad. G. Nadjakov Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tsarigradsko Chaussee, 1784 Sofia, Bulgaria^2

关键词: Frequency shift;    Nanostructured ZnO;    NO2 gas sensor;    Resonance frequencies;    Resonance frequency shift;    Sorption process;    Temperature sensitivity;    Time characteristics;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/514/1/012023/pdf
DOI  :  10.1088/1742-6596/514/1/012023

来源: IOP

【 摘 要 】

This paper reports studies on the sensitivity of ZnO layers to NO2exposure. ZnO layers were fabricated by electrochemical deposition on the surface of a quartz crystal microbalance (QCM) with Au electrodes. The sensitivity was estimated using the frequency-time characteristics of the QCM. For this purpose, the resonance frequency shift was measured. The sorption process was investigated in a NO2gas flow. The change in the resonance frequency, f of the QCM as a function of the loaded mass of NO2was followed for a NO2concentration of 500 ppm. Under gas exposure, the frequency decreased and reached saturation in five min. A frequency shift of 38 Hz was measured and a mass loading of 8.39 ng was calculated. The resonance frequency showed a very good recovery within two minutes after the NO2flow was switched off. The results demonstrate that the electrodeposited nanostructured ZnO layers have a potential for application as NO2gas sensors.