Study of magnetic field enhanced plasma immersion ion implantation in Silicon

15th International Congress on Plasma Physics; 13th Latin American Workshop on Plasma Physics

Pillaca, E.J.D.M.^1 ; Kostov, K.G.^1 ; Ueda, M.^2

Department of Physics and Chemistry, Faculty of Engineering-FEG, State University of São Paulo-UNESP, Av. Dr Ariberto Pereira da Cunha, Guartinguetä, SP 333, Brazil^1

Associ. Laboratory of Plasma, National Institute for Space Research, S. J. Campos, SP, Brazil^2

关键词: Electric and magnetic fields;    Electron-neutral collisions;    External magnetic field;    Ion current distribution;    Magnetic confinement;    Magnetized electrons;    Numerical calculation;    Plasma immersion ion implantation;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/511/1/012084/pdf
DOI  :  10.1088/1742-6596/511/1/012084

来源: IOP

【 摘 要 】

A comparison between experimental measurements and numerical calculations of the ion current distribution in plasma immersion ion implantation (PIII) with external magnetic field is presented. Later, Silicon samples were implanted with nitrogen ion to analyze the effect on them. The magnetic field considered is essentially non-uniform and is generated by two magnetic coils installed on vacuum chamber. The presence of both, electric and magnetic field in PIII create a crossed ExB field system, promoting drift velocity of the plasma around the target. The results found shows that magnetized electrons drifting in ExB field provide electron-neutral collision. The efficient ionization increases the plasma density around the target where a magnetic confinement is formed. As result, the ion current density increases, promoting significant changes in the samples surface properties, especially in the surface wettability.