Generation and application of the soft X-ray laser beam based on capillary discharge

15th International Congress on Plasma Physics; 13th Latin American Workshop on Plasma Physics

Frolov, Oleksandr^1 ; Kolacek, Karel^1 ; Straus, Jaroslav^1 ; Schmidt, Jiri^1 ; Prukner, Vaclav^1 ; Shukurov, Andrey^2

Institute of Plasma Physics AS CR, V.v.i., Za Slovankou 1782/3, 182 00 Prague, Czech Republic^1

Faculty of Mathematics and Physics, Charles University in Prague, Ke Karlovu 3, 121 16 Prague, Czech Republic^2

关键词: Capillary discharges;    Direct ablation;    Energy density;    Focused beams;    Laser-induced periodic surface structures;    Multi-layer mirrors;    Periodic surface structures;    Soft X-ray laser;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/511/1/012035/pdf
DOI  :  10.1088/1742-6596/511/1/012035

来源: IOP

【 摘 要 】

In this work we report on the generation and characterization of a focused soft X-ray laser beam with intensity and energy density that exceed the threshold for the ablation of PMMA. We demonstrate a feasibility of direct ablation of holes using a focused soft X-ray laser beam. Ablated craters in PMMA/gold-covered-PMMA samples were obtained by focusing the soft X-ray Ar8+laser pulses generated by a 46.9 nm tabletop capillary-discharge- pumped driver with a spherical Si/Sc multilayer mirror. It was found that the focused beam is capable by one shot to ablate PMMA, even if the focus is significantly influenced by astigmatism. Analysis of the laser beam footprints by atomic force microscope shows that ablated holes have periodic surface structure (similarly as Laser-Induced Periodic Surface Structure) with period ∼2,8 μm and with peak-to-peak depth ∼5-10 nm.