Real-time motion control and data acquisition system for scanning X-ray microscopy using programmable hardware

1st Conference on Light and Particle Beams in Materials Science 2013

物理学;材料科学

Inami, N.^1 ; Takeichi, Y.^1 ; Ono, K.^1

Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization (KEK), Ibaraki 305-0801, Tsukuba, Japan^1

关键词: Control and data acquisition systems;    Control and measurement;    Fpga(field programmable gate array);    Laser interferometer;    Piezoelectric elements;    Programmable hardware;    Reconfigurable circuits;    Scanning x-ray microscopy;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/502/1/012011/pdf
DOI  :  10.1088/1742-6596/502/1/012011

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

We developed a real-time motion control and measurement system for a scanning transmission X-ray microscope. The system was designed with an FPGA (field-programmable gate array), which is a programmable, reconfigurable circuit for real-time feature modification. This system enabled specimen stage control driven by a piezoelectric element and precise stage position measurement with a laser interferometer. Programmable hardware processing with FPGA realized high-speed control and measurement that cannot be handled by software processing. This system enables very high-speed control and measurement such as "on the fly" measurement.