Palm-top size X-ray microanalyzer using a pyroelectric focused electron beam with 100-micro-meter diameter

22nd International Congress on X-Ray Optics and Microanalysis

Kawai, Jun^1 ; Ohtani, Issei^1 ; Imanishi, Akira^1 ; Imashuku, Susumu^1

Department of Materials Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan^1

关键词: Aerosol modeling;    Aerosol particles;    Electron probe X-ray microanalyzer;    Focused electron beams;    Modeling specimens;    Si pin-detector;    X ray intensity;    X-ray microanalyzer;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/499/1/012011/pdf
DOI  :  10.1088/1742-6596/499/1/012011

来源: IOP

【 摘 要 】

We have developed a palm-top size EPMA (electron probe X-ray microanalyzer), operated by 3 V electric battery except for a rotary vacuum pump. The electron beam was generated by a pyroelectric single crystal, LiTaO3. A needle was used to make a focused electron beam. The smallest beam size was 100 μm on the sample surface. The X-ray spectra were measured through a Kapton window by a Si-PIN detector for a model specimen containing TiO2and MnO2particles, which was an aerosol model specimen, where TiO2and MnO2particles of size about 100-200 μm were separated by a few hundreds micrometers. By moving the sample stage manually, the X-ray spectra were measured for 300 s each by 300 μm e-beam, and the measured X-ray intensities were strong enough for identification of the major element in individual 100-200 μm size aerosol particles.