Mathematical modeling of nanomachining with atomic force microscope cantilevers

2nd International Conference on Mathematical Modeling in Physical Sciences 2013

物理学;数学

Chang, Win-Jin^1 ; Lee, Haw-Long^1 ; Yang, Yu-Ching^1

Department of Mechanical Engineering, Kun Shan University, Tainan 71003, Taiwan^1

关键词: Analytical expressions;    Atomic force microscope cantilevers;    Displacement time curves;    Excitation frequency;    Material length scale;    Material removal rate;    Maximum displacement;    Modified couple stress theories;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/490/1/012161/pdf
DOI  :  10.1088/1742-6596/490/1/012161

来源: IOP

【 摘 要 】

This article theoretically analyzes the cutting depth and material removal rate of an atomic force microscope (AFM) cantilever during nanomachining. An analytical expression for the vibration frequency and displacement of the cantilever has been obtained by using the modified couple stress theory. The theory includes one additional material length scale parameter revealing the micro-scale effect. According to the analysis, the results show that the effect of size-dependent on the vibration behavior of the AFM cantilever is obvious. The maximum displacement of nanomachining with the AFM cantilever represents the cutting depth. The area under the displacement-time curve is related to the material removal rate. When the excitation frequency is closer to the nature frequency of the cantilever, a larger material removal rate is obtained.