Abnormal glow discharge in crossed electric and magnetic fields in the presence of reactive gas

Low temperature Plasma in the Processes of Functional Coating Preparation

Luchkin, A.G.^1 ; Kashapov, N.F.^1 ; Luchkin, G.S.^1

Kazan (Volga Region) Federal University, 18 Kremljovskaja str., Kazan 420008, Russia^1

关键词: Abnormal glow discharge;    Consumer quality;    Crossed electric and magnetic fields;    Low temperature plasmas;    Reactive gas;    Reactive magnetron sputtering;    Volt-ampere characteristics;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/479/1/012019/pdf
DOI  :  10.1088/1742-6596/479/1/012019

来源: IOP

【 摘 要 】

The results of investigations of the low-temperature plasma at process of reactive magnetron sputtering of Ti target in the presence of reactive gas are described. Discharge volt-ampere characteristics for different schemas of reactive gas input are build. Optimal regimes of making strengthening coatings are defined. TiOx(0