An analytical derivation of non-local dependece of ionazation rate in the glow discharge

Low temperature Plasma in the Processes of Functional Coating Preparation

Sayfutdinov, A.I.^1

Department of General Physics, Kazan National Research Technical University after Name A.N.Tupolev-KAI, Kazan, Russia^1

关键词: Electron distribution function;    Electron mean free path;    Ionization process;    Ionization rates;    Kinetic equations;    Mean values;    Nonuniform electric field;    Numerical solution;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/479/1/012016/pdf
DOI  :  10.1088/1742-6596/479/1/012016

来源: IOP

【 摘 要 】

Based on the analysis of the kinetic equation for the electron distribution function, variables recorded in full energy-coordinate, showed that the rate of ionization is a function of the mean value of the electric field on the electron mean free path in the case of non-uniform electric field in a glow discharge, that is, there is a non-local of the ionization processes. Results are obtained from the numerical solution of non-local dependence of the ionization rate.