会议论文详细信息
Low temperature Plasma in the Processes of Functional Coating Preparation | |
An analytical derivation of non-local dependece of ionazation rate in the glow discharge | |
Sayfutdinov, A.I.^1 | |
Department of General Physics, Kazan National Research Technical University after Name A.N.Tupolev-KAI, Kazan, Russia^1 | |
关键词: Electron distribution function; Electron mean free path; Ionization process; Ionization rates; Kinetic equations; Mean values; Nonuniform electric field; Numerical solution; | |
Others : https://iopscience.iop.org/article/10.1088/1742-6596/479/1/012016/pdf DOI : 10.1088/1742-6596/479/1/012016 |
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来源: IOP | |
【 摘 要 】
Based on the analysis of the kinetic equation for the electron distribution function, variables recorded in full energy-coordinate, showed that the rate of ionization is a function of the mean value of the electric field on the electron mean free path in the case of non-uniform electric field in a glow discharge, that is, there is a non-local of the ionization processes. Results are obtained from the numerical solution of non-local dependence of the ionization rate.
【 预 览 】
Files | Size | Format | View |
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An analytical derivation of non-local dependece of ionazation rate in the glow discharge | 836KB | download |