Ions neutralization by reflection from solid target surface

Low temperature Plasma in the Processes of Functional Coating Preparation

Barchenko, V.T.^1 ; Babinov, N.A.^1

Saint Petersburg Electrotechnical University, Saint Petersburg, Russia^1

关键词: Incident angles;    Loss of energy;    Neutralization process;    Solid targets;    Target materials;    Three electrode-system;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/479/1/012008/pdf
DOI  :  10.1088/1742-6596/479/1/012008

来源: IOP

【 摘 要 】

The paper focuses on the one of the ion neutralization processes-process of ion neutralization by reflection from solid target surface. The three-electrode system of the fast neutrals source is considered as well as the main factors determining the parameters of neutrals beam. Moreover, the loss of energy during neutralization was obtained and the graphs of energy loss versus incident angle of the ion to the target for some target materials were built.