Influence of Bipolar Pulse Poling Technique for Piezoelectric Vibration Energy Harvesters using Pb(Zr,Ti)O3 Films on 200 mm SOI Wafers

13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Moriwaki, N.^1,2,4 ; Kobayashi, T.^2,3 ; Suzuki, Y.^4 ; Makimoto, N.^3 ; Fujimoto, K.^1,2 ; Suzuki, K.^1 ; Itoh, T.^2,3 ; Maeda, R.^2,3

Dai Nippon Printing Co., Ltd, 250-1 Wakashiba, Kashiwa, Chiba 277-0871, Japan^1

NMEMS Technology Research Organization, 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan^2

National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan^3

Ibaragi University, 4-12-1 Nakanarusawa Hitachi, Ibaraki 316-8511, Japan^4

关键词: Bipolar pulse;    Direct current power;    Figure of merits;    Pb(Zr , Ti)O3;    Piezoelectric property;    Piezoelectric vibration;    Poling treatment;    SOI wafers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/476/1/012132/pdf
DOI  :  10.1088/1742-6596/476/1/012132

来源: IOP

【 摘 要 】

Piezoelectric vibration energy harvester arrays using Pb(Zr,Ti)O3thin films on 200 mm SOI wafers were fabricated. In-plane distribution of influence of bipolar pulse poling technique on direct current (DC) power output from the harvesters was investigated. The results indicate that combination poling treatment of DC and bipolar pulse poling increases a piezoelectric property and reduces a dielectric constant. It means that this poling technique improves the figure of merit of sensors and harvesters. Maximum DC power from a harvester treated by DC poling after bipolar pulse poling is about five times larger than a one treated by DC poling only.