Hard X-ray Imaging Microscopy using X-ray Guide Tube as Beam Condenser for Field Illumination

11th International Conference on X-ray Microscopy

Suzuki, Yoshio^1 ; Takeuchi, Akihisa^1 ; Uesugi, Kentaro^1 ; Terada, Yasuko^1 ; Nakazawa, Hiromoto^2 ; Ohzawa, Sumito^3 ; Aoyama, Tomoki^3 ; Nii, Hajime^3 ; Handa, Katsumi^3

JASRI/SPring-8, Koto 1-1-1 Sayo, Hyogo 679-5198, Japan^1

NIMS, Ibaragi 305-0047, Tsukuba, Japan^2

Horiba, Ltd., Minami-ku, Kyoto 601-8510, Japan^3

关键词: Exposure-time;    Flux densities;    Fresnel zone plate;    Hard x-ray imaging;    Mono-capillary;    Objective lens;    X-ray energies;    Xray imaging;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/463/1/012028/pdf
DOI  :  10.1088/1742-6596/463/1/012028

来源: IOP

【 摘 要 】

An optical system for illumination of object in x-ray imaging microscopy is developed. The optical system is a beam condenser consisting of a single-bounce conical-shape mono-capillary (x-ray guide tube: XGT) made of Pyrex glass. The XGT condenser was tested at the beam line 47XU of SPring-8 using a Fresnel zone plate as an objective lens. Comparing with the microscope without beam condenser, the flux density is improved by a factor of 12-20 in the x-ray energy range of 6-8 keV. Test patterns with a 50 nm-structure are clearly resolved at 8 keV with an exposure time less than 1 s.