Current-Voltage Characteristics of DC Discharge in Micro Gas Jet Injected into Vacuum Environment

11th Asia Pacific Conference on Plasma Science and Technology;25th Symposium on Plasma Science for Materials

Matra, K.^1 ; Furuta, H.^1 ; Hatta, A.^1

Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Kochi, 782-8502, Japan^1

关键词: Ballast resistors;    Counter electrodes;    Direct current;    Discharge modeling;    High-vacuum environments;    Lower pressures;    Stray capacitors;    Vacuum environment;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/441/1/012021/pdf
DOI  :  10.1088/1742-6596/441/1/012021

来源: IOP

【 摘 要 】

A current-voltage characteristic of direct current (DC) gas discharge operated in a micro gas jet injected into a secondary electron microscope (SEM) chamber is presented. Ar gas was injected through a 30 μm orifice gas nozzle (OGN) and was evacuated by an additional pump to keep the high vacuum environment. Gas discharges were ignited between the OGN as anode and a counter electrode of Si wafer. The discharge was self-pulsating in most of the cases while it was stable at lower pressure, larger gap length, and larger time averaged current. The self-pulsating discharge was oscillated by the RC circuit consisting of a stray capacitor and a large ballast resistor. The real time plots of voltage and current during the pulsating was investigated using a discharge model.