Atmospheric Pressure Plasma Generation using Dielectric Barrier Discharge Stacked by Insulator Coated Comb-Electrodes

11th Asia Pacific Conference on Plasma Science and Technology;25th Symposium on Plasma Science for Materials

Honda, Masaya^1 ; Sasaki, Toru^1 ; Aso, Tsukasa^1 ; Kikuchi, Takashi^1,2 ; Harada, Nob^1

Department of Electrical, Electronics and Information Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan^1

Department of Nuclear System Safety Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan^2

关键词: Atmospheric pressure plasmas;    Comb electrodes;    Dielectric barrier discharges;    Ozone concentration;    Spectroscopic measurements;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/441/1/012020/pdf
DOI  :  10.1088/1742-6596/441/1/012020

来源: IOP

【 摘 要 】

To generate volumetric atmospheric-pressure plasma, we proposed a dielectric barrier discharge system with stacked insulator-coated comb-electrodes. The large volumetric plasma was generated in each gap and surface of insulators by stacking electrodes. From the spectroscopic measurement of plasma, almost same shaped spectra were measured from 2 to 10 electrodes. In addition, the ozone concentration in plasma was estimated by the absorption spectroscopy. In this result, the constant ozone concentration was measured from 2 to 10 electrodes.