Laser etching rates of sapphire glass using metal targets

6th Vacuum and Surface Sciences Conference of Asia and Australia

Hamdani, A.H.^1 ; Nasir, A.^2 ; Sarwar, S.^2 ; Ansar, A.^1 ; Akhter, R.^1 ; Aslam, M.^1

Pakistan Institute of Lasers and Optics, P. O. Box 505, Rawalpindi, Pakistan^1

Department of Electrical Engineering, International Islamic University, Islamabad, Pakistan^2

关键词: Ablation depth;    Ambient pressures;    Laser etching;    Laser scan speed;    Pulsed Nd:YAG laser;    Q switched Nd:YAG laser;    Target materials;    Target-substrate;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/439/1/012051/pdf
DOI  :  10.1088/1742-6596/439/1/012051

来源: IOP

【 摘 要 】

Q-switched Nd:YAG laser with an output power of 40 watts has been used to study LIPAA etch rates of Sapphire glass in air with different target materials including stainless steel, brass and mild steel. Experiments showed that an ablation depth of 50μm has been achieved in sapphire at a zero target-substrate gap at ambient pressure. The etch depth versus laser scan speed and laser power have also been studied. An etched depth of 200μm is achieved at a scan speed of 20mm/sec with stainless steel as target.