Bulk etching of silicon wafer and development of a polyimide membrane

6th Vacuum and Surface Sciences Conference of Asia and Australia

Aslam, M.^1

Head, Electronic Materials and Processing Division, Pakistan Vacuum Society, PO Box 1880, Islamabad, Pakistan^1

关键词: Array of sensors;    Elevated temperature;    Gas sensing devices;    Metal oxide gas sensors;    Minimum temperatures;    Polyimide membranes;    Sensing layers;    State-of-the-art system;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/439/1/012029/pdf
DOI  :  10.1088/1742-6596/439/1/012029

来源: IOP

【 摘 要 】

Progress in the field of engineering is always dependent on new materials. For quite some time, smart and state of the art systems are seen demanding from a modern point of view. The gas sensing devices are turned into an array of sensors than a single sensor to materialize the concept of electronic nose. The metal oxide gas sensors are actively sensitive to gas species at an elevated temperature of more than 250°C. To achieve this minimum temperature requirement, micro-heaters are developed on a certain substrate which ensures the utilization of heat energy for sensing layer of metal oxide such as tin oxide (SnO2). In this paper, a substrate having good thermal insulation has been discussed.