Effect of doping on the Structural and Optical Properties of SnO2 Thin Films fabricated by Aerosol Assisted Chemical Vapor Deposition

6th Vacuum and Surface Sciences Conference of Asia and Australia

Ali, Syed Mansoor^1 ; Hussain, Syed Tajammul^2 ; Bakar, Shahzad Abu^2,3 ; Muhammad, Jan^1 ; Rehman, Naeem Ur^4

Department of Physics, Islamia University of Bahawalpur, Pakistan^1

NSand CD, National Center for Physics, Islamabad, Pakistan^2

Department of Chemistry, Quaid-i-Azam University, Islamabad, Pakistan^3

National Center for Nanothechnology, Deparment of Chemical and Material Engineering, Pakistan Institute of Engineering and Applied Sciences (PIEAS), Islamabad, Pakistan^4

关键词: AACVD;    Aerosol-assisted chemical vapor depositions;    Dopant concentrations;    High conductivity;    Mg concentrations;    Molar concentration;    Structural and optical properties;    Tetragonal structure;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/439/1/012013/pdf
DOI  :  10.1088/1742-6596/439/1/012013

来源: IOP

【 摘 要 】

In order to achieve high conductivity and transmittance of transparent conducting oxide (TCO), we attempted to fabricate Mg doped SnO2(MgxSn1-xO2) thin films and characterized them for their structural and optical properties. The MgxSn1-xO2thin films have been deposited on glass substrate by using aero-sole assisted chemical vapor deposition (AACVD). The molar concentration of Mg concentration was changed from 0 to 8%. The confirmation of tetragonal structure and particle size (32 to 87nm) has been calculated of thin films by XRD. The surface roughness is decreased with the increase of the dopant concentration, which has been investigated by atomic force microscopy (AFM). The optical transmission has increased from 54 to 78% and the band gape of pure SnO2has been found to be in the range of 3.76eV and it is shifted to 3.69eV for 6Wt % Mg doping and then increase on further increasing the Mg doping.