The improved Pt/ZnO/Al2O3 electrode for high temperature SAW sensors

2018 International Conference on Civil and Hydraulic Engineering

土木建筑工程;水利工程

Liu, Xing Peng^1 ; Peng, Bin^1

University of Electronic Science and Technology of China, Chengdu, SICHUAN

611731, China^1

关键词: After high temperature;    Al2O3 films;    Crystalline quality;    Double buffers;    Electrical measurement;    High temperature;    SAW sensors;    Surface acoustic wave sensors;   

Others  :  https://iopscience.iop.org/article/10.1088/1755-1315/189/5/052032/pdf
DOI  :  10.1088/1755-1315/189/5/052032

学科分类：土木及结构工程学

来源: IOP

【 摘 要 】

In this study, Pt/ZnO/Al2O3 multilayer film were fabricated on La3Ga5SiO14 substrates as the electrodes of surface acoustic wave (SAW) sensors working at high temperature. The Al2O3 film was employed as the first buffer layer to promote the crystalline qualities of the Pt and ZnO layers. This Pt/ZnO/Al2O3 sample was found to significantly improve the electrode's reliability at high temperature. After high temperature electrical measurement, the varied microstructures of the Pt/ZnO/Al2O3 electrodes were analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM) to investigate its mechanism for stable resistance. The conductive stability of the Pt/ZnO/Al2O3 film was found to be improved at 800 °C by using Al2O3 buffer layer. This proposed ZnO/Al2O3 double buffer layers have great potential in improving the conductive stability of electrodes for SAW devices at high temperature.