Thermodynamic Behavior of SiCl4 in Hydrogenation System of Siemens Process

2018 International Conference of Green Buildings and Environmental Management

土木建筑工程;生态环境科学

Wang, Chunlong^1 ; Fang, Wenbao^1 ; Du, Peng^2 ; Tian, Lin^3 ; Xie, Gang^3 ; Lin, Yan^1 ; Hou, Yanqing^2

State Key Laboratory of Complex Nonferrous Metal Resources Clean Utilization, Kunming

650093, China^1

Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming

650093, China^2

Technolygy Center of Yunnan Metallurgy Group Co., Kunming

650031, China^3

关键词: Converting ratio;    Hydrogenation process;    Increasing temperatures;    Practical production;    Residual ratios;    Siemens process;    Thermodynamic behaviors;    Through current;   

Others  :  https://iopscience.iop.org/article/10.1088/1755-1315/186/5/012055/pdf
DOI  :  10.1088/1755-1315/186/5/012055

来源: IOP

【 摘 要 】

The modified Siemens process is the major process of producing polysilicon through current technologies. The main by-production SiCl4 converting to SiHCl3 by hydrogenation process is an effective manner for reducing the cost. The temperature, pressure and initial molar ratio of H2 to SiCl4 have vital influence on the SiCl4 converting ratio. When all of those are close to the practical production conditions, the residual ratio of SiCl4 in the Siemens process for the production of polysilicon can be calculated. We mainly discuss that the temperature, pressure and initial molar ratio of H2 to SiCl4 have effect on the SiCl4 converting ratio. The results show that the residual ratio of SiCl4 decreases with increasing temperature when Other conditions constant. The decreasing rate with increasing temperature is quicker when the constant initial molar ratio of H2 to SiCl4 is larger and the pressure is lower. The pressure has little effect on the residual ratio of SiCl4 with Other conditions remain unchanged. The initial molar ratio of H2 to SiCl4 has a negative effect on the residual ratio of SiCl4 and the residual ratio of SiCl4 decreases more slowly with the temperature higher, when Other conditions constant. The residual ratio of SiCl4 decreases more quickly with increasing the initial molar ratio of H2 to SiCl4 when the temperature is higher. However the residual ratio of SiCl4 decrease with almost a constant rate in any pressure when the initial molar ratio of H2 to SiCl4 increases.