Microstructure related properties of gadolinium fluoride films deposited by molybdenum boat evaporation

2nd International Conference on Materials Science, Energy Technology and Environmental Engineering

材料科学;能源学;生态环境科学

Chang, Y.H.^1 ; Wang, C.Y.^1 ; Qi, L.Q.^1 ; Liu, H.^1

College of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun, Jilin, China^1

关键词: Deep ultraviolet;    Deposition temperatures;    Packing density;    Single layer;    Structure property;    Temperature rising;   

Others  :  https://iopscience.iop.org/article/10.1088/1755-1315/81/1/012036/pdf
DOI  :  10.1088/1755-1315/81/1/012036

来源: IOP

【 摘 要 】

In order to optimize the performance of fluoride thin films in wavelength of Deep Ultraviolet (DUV), GdF3 single layers are prepared by thermal evaporation at different deposition temperatures on Fused Silica. Optical and structure properties of each sample are characterized. The results that the refrac-tive index increased gradually and the crystallization status becomes stronger with the temperature rising, the inhomogeneous of the thin films present linearity. The decrease total optical loss with deposited temper-ature is attributed to the higher packing density and lower optical absorption.