Effect of gold and nickel co-additives on gas-sensitive characteristics of SnO2 thin-film on exposure to hydrogen and nitrogen dioxide

16th International Conference of Students and Young Scientists "Prospects of Fundamental Sciences Development"

自然科学（总论）

Almaev, A.V.^1^2 ; N.N., Yakovlev ; E.V., Chernikov

Department of Semiconductor Electronics, Tomsk State University, Tomsk

634050, Russia^1

Laboratory of Functional Electronics, Tomsk State University, Tomsk

634050, Russia^2

Laboratory of Physics of Semiconductor Devices, Kuznetsov Siberian Physical Technical Institute, Tomsk State University, Tomsk

634050, Russia^3

关键词: Dc magnetron sputtering;    Gas sensitive characteristics;    Gas sensitive property;    High reproducibility;    Lattice oxygen atoms;    Low concentrations;    Synergistic effect;    Tin dioxide thin film;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/597/1/012041/pdf
DOI  :  10.1088/1757-899X/597/1/012041

学科分类：自然科学（综合）

来源: IOP

【 摘 要 】

The results of investigation of the gas-sensitive properties of sensors based on the tin dioxide thin films with combined additives of gold and nickel obtained by the DC - magnetron sputtering are presented. The investigated sensors are characterized by a high response to low concentrations of NO2 of 0.45 - 10.23 ppm at temperatures of 50 - 150 °C with response time of 10 s. The sensitivity of sensors to hydrogen appears at the temperature of 250 °C. The hydrogen sensors are characterized by high reproducibility of the measurement results. The obtained results are explained by the synergistic effect of gold and nickel additives, as well as the ability of the Ni to prevent the interaction of hydrogen with lattice oxygen atoms in the subsurface part of tin dioxide.